The Nano and Microfabrication Division has an infrastructure dedicated to the design, manufacturing and characterization of functional devices and systems. Research in micro- and nanotechnologies is essential for many national and international research groups, and companies that require adequate infrastructure. The device manufacturing facilities at LNNano are important tools to improve the level of academic R&D, but also to promote innovation and competitiveness in the sector.

Our facilities are open to external users, offering equipment to integrated processes for the manufacture of devices involving deposition of thin films, photolithography, recording and integration. The micro and nanofabrication facilities include a set of clean rooms (class 100, 1000 and 10000), with more than 20 advanced manufacturing pieces of equipment with optimized processes. Alongside manufacturing, the division also offers a set of systems for the electrical characterization of devices. Our team of experts supports students and researchers through training and maintenance of equipment and processes.

Our in-house research is focused on the development of components based on nanomaterials and nanostructures with unique functionalities. From sensors on flexible substrates to micro and nanofluidic systems, the research carried out in the division seeks a synergistic balance between basic knowledge and application geared to address health, energy and environmental demands.