Our facilities are open to third-party users, providing integrated equipment and processes for the nano and microfabrication of devices involving thin film deposition, photolithography, electron beam lithography, etching, corrosion, and integration processes. The micro- and nano-fabrication facilities feature a set of clean rooms in classes 100, 1000, and 10000, with more than 20 pieces of advanced manufacturing equipment. Alongside manufacturing, the division offers a set of systems for the electrical characterization of devices. The team of specialists supports students and researchers through training and maintenance of the equipment and processes.
- Get to know the division
- Facilities
- In-situ Growth Laboratory (LCIS)
- Spectroscopy and Scattering Laboratory
- Photoelectrochemistry Laboratory
- Transmission Electron Microscopy Laboratory
- Scanning and Dual-Beam Electron Microscopy Laboratory
- Atomic Force Microscopy Laboratory
- Nanoceramics Processing Laboratory
- Nanomaterials Synthesis Laboratory
- Staff
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