Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma

Journal of Vacuum Science & Technology A v. 36, n. 2, p. 021403, 2018 1.761 10.1116/1.4999045 Schianti, J. N. de ; Nascimento, F. do; Ramirez, J. C.; Machida, M.; Gabrielli, L. H.; Hernandez- Figueroa, H. E.; Moshkalev, S. A. 2018