Surface characterization of Zr/Ti/Nb tri-layered films deposited by magnetron sputtering on Si(111) and stainless steel substrates

Journal of Vacuum Science & Technology A v. 30, n.5, p. 051505-051508, 2012 1.253 10.1116/1.4737616 Tallarico, D. A.; Gobbi, A. L.; Paulin-Filho, P. I.; Galtayries, A.; Nascente, P. A. P. 2012