Role of the reactive sputtering deposition power in the phase control of cobalt oxide films

Journal of Vacuum Science & Technology A v. 36, n. 6, p. 061512, 2018 1.761 10.1116/1.5046952 Azevedo Neto, N. F.; Leite, D. M. G.; Lisboa-Filho, P. N.; Silva, J. H. D. da 2018