Preliminary evaluation of the influence of the temperature on the performance of a piezoresistive pressure sensor based on a-SiC film

Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems v.17, n.3, p.477-480, 2011 1.071 10.1007/s00542-011-1244-8 Fraga, M. A.; Massi, M.; Furlan, H.; Oliveira, I. C.; Rasia, L. A.; Mateus, C. F. R. 2011