Films Deposited from Reactive Sputtering of Aluminum Acetylacetonate Under Low Energy Ion Bombardment

Materials Research-Ibero-american Journal of Materials v. 20, n. 4, p. 926-936, 2017 0.634 10.1590/1980-5373-MR-2016-0647 Battaglin, F. A. D.; Prado, E. S.; Caseli, L.; Silva, T. F.; Tabacniks, M. H.; Cruz, N. C. da; Rangel, E. C. 2017