Effects of substrate temperature, substrate orientation, and energetic atomic collisions on the structure of GaN films grown by reactive sputtering

Journal of Applied Physics v. 114, n. 18, p. 183515, 2013 2.21 10.1063/1.4828873 Schiaber, Z. S.; Leite, D. M. G.; Bortoleto, J. R. R.; Lisboa-Filho, P. N.; Silva, J. H. D. da 2013