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Equipment

Dektak DXT S – Bruker

  • Size of the sample: Up to 176 mm;
  • Measure type: by touch;
  • Tip radius: 12.5 µm;
  • Imaging software: VISION64 Offline Analysis Software;
  • Anti-vibration desk;
  • Sample holder with vacuum for 50 mm and 76 mm wafer;
  • Calibration pattern: 88 nm;
  • Resolution in z: 0.4 nm.
  • 3.1 Mpixel camera

Dektak 150 – Veeco

  • It has a module for 3D mapping;
  • Can measure up to 100 mm substrates;
  • Maximum thickness: 1mm;
  • Automatic X-Y stage;
  • Vertical resolution: 1 Angstrom.

Equipment

Dektak DXT S – Bruker

Tamanho de amostra: Até 176 mm
Tipo de medida: Por contato
Raio da ponta: 12.5 µm
Software para tratamento de imagem: VISION64 Offline Analysis Software
Mesa anti-vibratória
Porta amostras com vácuo para wafer de 50 mm e 76 mm
Padrão de calibração: 88 nm
Resolução em z: 0.4 nm
Câmera de 3.1 Mpixel

Dektak 150 – Veeco

  • It has a module for 3D mapping;
  • Can measure up to 100 mm substrates;
  • Maximum thickness: 1mm;
  • Automatic X-Y stage;
  • Vertical resolution: 1 Angstrom.