MICROFABRICATIONMicrofabricação is a set of techniques to fabricate devices and/or sensors in the 10-6 mm scale. Among the various techniques, the following stand out: photolithography, thin film deposition and corrosion. Some 3D printing technologies also fall into this category as they have print resolutions on this same scale. The laboratory has a park of equipment dedicated to each stage of the process, including hoods for cleaning, developing samples and spreading resins, optical microscopes for inspecting samples in the processing phase, in addition to a hot plate and oven for heat treatment.
Equipamentos comuns aos processos de microfabricação
Optical microscope
- Sample Size: Up to 100mm;
- Available lenses (conventional optical microscope): 5x, 10x, 20x, 50x, 100x and 150x;
- Software for measurements and photographs;
- Manual operation;
- Available inside cleanrooms for inspection of samples in processing.
Polypropylene fume hoods for sample cleaning
- Sample Size: Up to 100mm;
- Available lenses (conventional optical microscope): 5x, 10x, 20x, 50x, 100x and 150x;
- Software for measurements and photographs;
- Manual operation;
- Available inside cleanrooms for inspection of samples in processing.
Thermo vacuum oven for heat treatment
- Substrate Size: Up to 100mm diameter wafers;
- Maximum speed: 8,000 rpm;
- Vacuum: Venturi (Heavy samples should be rotated at a slower speed – risk of being ejected).
Thermo vacuum oven for heat treatment
- Temperature: up to 320°C
- Available gases: Ar, N2
Polypropylene fume hoods for sample cleaning
Sample Size: Up to 100mm;
Available lenses (conventional optical microscope): 5x, 10x, 20x, 50x, 100x and 150x;
Software for measurements and photographs;
Manual operation;
Available inside cleanrooms for inspection of samples in processing.
Optical microscope
Sample Size: Up to 100mm;
Available lenses (conventional optical microscope): 5x, 10x, 20x, 50x, 100x and 150x;
Software for measurements and photographs;
Manual operation;
Available inside cleanrooms for inspection of samples in processing.
Spinner para espalhamento de resina WS 650MZ (Laurell)
Tamanho de substratos: Até wafers de 100 mm de diâmetro.
Velocidade máxima: 8.000 rpm.
Vácuo: Venturi (Amostras pesadas devem ser rotacionadas com velocidade menor – risco de ser arremessada)
Thermo vacuum oven for heat treatment
Temperature: up to 320°C
Available gases: Ar, N2