This microscope uses a high-brightness and high-coherence electron beam to carry out ultra-high resolution microchemical analysis using its attached energy dispersive x-ray spectrometer (EDS) and electron energy loss spectrometer (EELS). The 2100 FEG-TEM is also equipped with a scanning image observation device, thus becoming a so-called scanning transmission electron microscope (STEM). This enables researchers to observe and investigate samples in a scanning mode that further expands its applications; for instance, to acquire a material’s chemical composition from a small point or a line profile, or to reveal elemental distribution maps.
This FEG-TEM is also equipped with a Gatan imaging filter that comes with sophisticated software covering all aspects of energy-filtered imaging and energy-loss spectroscopy (EELS). Energy-filtering is a powerful technique that can dramatically improve image contrast and resolution in the TEM as well as quickly obtain highly sensitive elemental maps of materials. By contrast, energy-filtering transmission electron microscopy (EFTEM) is capable of producing electron images from only a narrow range of energies.
Accelerating Voltage: 160, 200 kV
Electron Gun: ZrO/W(100) Schottky field emission electron source
Scanning System: JEOL SIOD digital scanning system with HAADF detector and, Gatan with BF and ADF detector
0.19 nm (point-to-point)
0.10 nm (lattice)
0.14 nm (STEM lattice)
2—5 nm (TEM mode)
0.5—2.4 nm (Analytical mode)
Specimen Tilt: +/- 25° (X/Y)
Image Recording: CCD and/or film
EDS: Noran system
ELS/Imaging Filter: Gatan (863 GIF Tridiem) system
CCD camera: Gatan 2k x 2k