LNNano - Brazilian Nanotechnology National Laboratory

SEM-FEG HR (FEI Inspect)


FEI Inspect F50High Resolution SEM

 Technical Specifications (TS)


  • Everhart Thornley SED (secondary electron detector)
  • Large Field Detector (LFD)
  • IR camera for viewing sample in chamber
  • vCD (low voltage high contrast detector)/BSE
  • In-column detector (ICD) for secondary electrons in BD mode
  • Solid State STEM detector

Electron Optics

  • High resolution Schottky field emission (FEG)
  • Accelerating voltage: 200 V to 30 kV
  • Probe Currente: ≤ 200 nA

Electron Beam resolution

  • High vacuum

0.9 nm at 30 kV (STEM)

1.2 nm at 30 kV (SE)

1.0 nm at 30 kV (SE with plasma cleaner installed)

2.9 nm at 1 kV (SE)

2.3 nm at 1 kV (BD mode + ICD)

3.1 nm at 200 V (BD mode + ICD)

2.5 nm at 30 kV (BSE)

3.0 nm at 1 kV (BD mode + BSE)

Vacuum System (Oil free)

  • Chamber vacuum (high) < 6e-4 Pa

For imaging and microanalysis of conductive and/or conventionally prepared specimens.

System Options

  • Beam Deceleration (BD)

For conductive and partially conductive samples, which applies negative voltage of up to 4 kV to the sample.

High speed and sensitivity XEDS system, 80 mm2 SDD