Equipment
Dektak DXT S – Bruker
- Size of the sample: Up to 176 mm;
- Measure type: by touch;
- Tip radius: 12.5 µm;
- Imaging software: VISION64 Offline Analysis Software;
- Anti-vibration desk;
- Sample holder with vacuum for 50 mm and 76 mm wafer;
- Calibration pattern: 88 nm;
- Resolution in z: 0.4 nm.
- 3.1 Mpixel camera
Dektak 150 – Veeco
- It has a module for 3D mapping;
- Can measure up to 100 mm substrates;
- Maximum thickness: 1mm;
- Automatic X-Y stage;
- Vertical resolution: 1 Angstrom.
Equipment
Dektak DXT S – Bruker
Tamanho de amostra: Até 176 mm
Tipo de medida: Por contato
Raio da ponta: 12.5 µm
Software para tratamento de imagem: VISION64 Offline Analysis Software
Mesa anti-vibratória
Porta amostras com vácuo para wafer de 50 mm e 76 mm
Padrão de calibração: 88 nm
Resolução em z: 0.4 nm
Câmera de 3.1 Mpixel
Dektak 150 – Veeco
- It has a module for 3D mapping;
- Can measure up to 100 mm substrates;
- Maximum thickness: 1mm;
- Automatic X-Y stage;
- Vertical resolution: 1 Angstrom.