LNNano - Brazilian Nanotechnology National Laboratory


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January, 2012

New Heidelberg µpg 101 Table Top Laser Pattern Generator installed in Microfabrication Laboratory

LMF acquired and installed on January 2012 a new Laser Pattern Generator from Heidelberg. The equipment is a table top capable of generating patterns as thin as 3 µm. The µPG 101 is an extremely economical and easy to use micro pattern generator for direct writing applications and low volume mask making. It can also be used for direct writing on wafers (Silicon and other materials). It basically works like a desktop printer with a resolution of 250,000dpi. The system can be used for applications like MEMS, BioMEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high resolution microstructures. Equipment website: http://www.himt.de/en/products/muepg101.php.

Key features and options:

  • Substrates Dimensions from 2” to 5”, maximum thickness 6mm, flatness < ± 20μm.
  • Structures down to 3 μm.
  • Multiple data input formats (DXF, CIF, GDS, BMP).
  • Camera system for alignment.
  • Resists: S18XX, AZ15XX, AZ45XX, AZ92XX, SU-8


Work performed in the LNNANO was awarded at the 16th National Meeting on Analytical Chemistry, held at Campos do Jordão, in October 2011, as one of the top ten best papers.

In the work “Colorimetric Microfluidic Device Paper Based for Iron Analysis”, Caio Soares, a LMF trainee under supervision of Danielle Ferreira and Angelo Gobbi and in collaboration with Carlos Scorzato (LNLS), built a low cost portable colorimeter capable of quantifying colorimetric assays. This same study, which uses microfluidic devices based on paper to quantify the presence of iron in aqueous solution, had been awarded during the XXXII Brazilian Congress on Vacuum Applications in August, 2011.


New Sputtering ATC ORION 8 UHV System installed in Thin Film Laboratory.

The LMF has recently acquired a new ATC ORION 8 Sputtering Deposition System from AJA International, INC. These UHV systems offer some unique features such as TUNING CHIMNEYS designed to optimize deposition uniformity. These systems use AJA’s exclusive A300-XP (UHV) magnetron sputtering sources (2″) and can be fitted with heating stages to accommodate substrates up to 4″ diameter. The Substrate can be heated up to800°C. The ATC ORION Series Sputtering Systems features a con-focal sputter source flange oriented at specific angles. The specially designed chimney/ground shield/shutter system allows a high degree of deposition uniformity over substrates over twice the target diameter. The con-focal ATC ORION systems utilize motorized rotating substrate holders to achieve excellent uniformity, allow the co-deposition of alloy films and facilitate the deposition of pristine ultra-thin film multilayers since the substrate is always “in the plasma”. Two reactive gas injection rings, substrate RF bias capability, in-situ manual Z motion (for working distance adjustment and load-lock transfer) are available in this system. A Labview based Phase II-J computer control allows the user to operate in either “manual mode” or “automated processing mode”. In the “automated” processing mode the user designs process “layers” which are then compiled and saved as a “process”. The ATC ORION 8 system accommodate (4) targets operating in DC mode and (1) RF target. For more information visit Equipament page Link.









Control System                                                                          Deposition Chamber and Load Lock

MAY 2011

 New Bruker Dektak 150 Profiler installed in Microfabrication Laboratory.

LMF recently acquired a new Dektak 150 profiler from Bruker. Please visit the Equipment Page Link for more information. With its small footprint, latest generation technology and extensive add-on capabilities, the Dektak 150 enables superior performance and versatility. The system is equipped with a 150mm X-Y motorized stage that facilitates 3D mapping, automation and programmability. Other features that enhance the system for specific applications:

  • Excellent measurement repeatability
  • Easiest to use
  • Versatility for multiple applications.
  • Widest variety of tips to address more applications.
  • Exclusive QuickChange feature enables safe and simple stylus exchange.









Platinum/Cobalt discs with 2um in diameter and 40nm thick