LNNano - Brazilian Nanotechnology National Laboratory

SEM-FEG ENV (FEI Quanta)

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FEI Quanta 650 FEGHigh Resolution E-SEM

Technical Specifications (TS)

Detectors

  • Everhart Thornley SED (secondary electron detector)
  • Large Field Low vacuum SED (LFD)
  • Gaseous SED (GSED) (used in ESEM mode)
  • IR camera for viewing sample in chamber
  • Gaseous BSED (BSE detector for high pressures, used in ESEM mode)
  • vCD (low voltage high contrast detector)
  • In-column detector (ICD) for secondary electrons in BD mode
  • Gaseous analytical BSED (GAD)
  • Ceramic Gaseous SE detector (CGSED) for high temperature experiments
  • Solid State STEM detector

Electron Optics

  • High resolution Schottky field emission (FEG)
  • Accelerating voltage: 200 V to 30 kV
  • Probe Currente: ≤ 200 nA

Electron Beam resolution

  • High vacuum

1.2 nm at 30 kV (SE)

2.5 nm at 30 kV (BSE)

3.0 nm at 1 kV (SE)

  • High vacuum with beam deceleration option

3.0 nm at 1 kV (BD mode + BSED)

2.3 nm at 1 kV (BD mode + ICD)

3.1 nm at 200 V (BD mode + ICD)

  • Low vacuum

1.4 nm at 30 kV (SE)

2.5 nm at 30 kV (BSE)

3.0 nm at 3kV (SE)

  • Extended vacuum mode (ESEM)

1.4 nm at 30 kV (SE)

Vacuum System (Oil free)

  • High vacuum < 6e-4 Pa

For imaging and microanalysis of conductive and/or conventionally prepared specimens.

  • Low vacuum < 130 Pa

For imaging and microanalysis of non-conductive specimens without preparation.

  • ESEM vacuum < 4000 Pa

For high-vacuum incompatible specimens which are impossible to investigate with traditional EM methods.

System Options

  • Beam Deceleration

For conductive and partially conductive samples, which applies negative voltage of up to 4 kV to the sample.

  • Peltier cooled specimen stage (-20ºC at +60ºC)
  • High temperature heating specimen stage ( 25ºC at 1000°C)
  • High speed EBSD system, capable of 600 points-per-second (spatial resolution of 10 nm)
  • High speed and sensitivity XEDS system, 80 mm2 SDD